Nanometer lapping technology at high speed  

作　　者：YANG JianDong TIAN ChunLin WANG ChangXing 

机构地区：[1]School of Mechanical and Electrical Engineering,Changchun University of Science and Technology,Changchun 130022,China

出　　处：《Science China(Technological Sciences)》2007年第1期27-38,共12页中国科学（技术科学英文版）

基　　金：the National Natural Science Foundation of China (Grant No. 50375021)

摘　　要：In floating lapping with solid abrasives, the workpiece is taken as an isolated body. The forces that act on it are analyzed. A differential equation about the forces that act on it is set up, so the forces that act on it and its motion rule are received. Combining it with known lapping tool motion, the relative motion rule between the lapping tool and workpiece is determined too. According to the relative motion, the distribution of abrasives density is designed reasonably, which makes the lapping tool wear uniformly, which, in turn, avoids redressing the lapping tool, saves abra-sives, and increases machining accuracy. Combining it with advantages in high speed lapping with solid abrasives, the low cost, high efficiency nanometer lapping at high speed is realized.In floating lapping with solid abrasives, the workpiece is taken as an isolated body. The forces that act on it are analyzed. A differential equation about the forces that act on it is set up, so the forces that act on it and its motion rule are received. Combining it with known lapping tool motion, the relative motion rule between the lapping tool and workpiece is determined too. According to the relative motion, the distribution of abrasives density is designed reasonably, which makes the lapping tool wear uniformly, which, in turn, avoids redressing the lapping tool, saves abrasives, and increases machining accuracy. Combining it with advantages in high speed lapping with solid abrasives, the low cost, high efficiency nanometer lapping at high speed is realized.

关 键 词：NANOMETER MACHINING high SPEED LAPPING solid ABRASIVES force ANALYZING 

分 类 号：TB383.1[一般工业技术—材料科学与工程]