Pulsed Laser Deposition of Boron Carbon Nitride Coatings  

作　　者：侯清润 高炬 

出　　处：《Rare Metals》1998年第1期23-29,共7页稀有金属（英文版）

摘　　要：oron carbon nitride coatings were synthesized using the pulsed laser deposition method. The hardness of the coatings was measured by a Vickers microhardness tester. It was found that the hardness of the coatings was between 15.45 and 34.05 GPa under a load of 0.5 N. The surface morphology was studied by optical microscopy and atomic force microscopy. There were spherical and irregular shaped particulates in the coatings. The density of the spherical particles was found being increased at high deposition temperatures. The rootmeansquared surface roughness of the coatings was about 4 nm.oron carbon nitride coatings were synthesized using the pulsed laser deposition method. The hardness of the coatings was measured by a Vickers microhardness tester. It was found that the hardness of the coatings was between 15.45 and 34.05 GPa under a load of 0.5 N. The surface morphology was studied by optical microscopy and atomic force microscopy. There were spherical and irregular shaped particulates in the coatings. The density of the spherical particles was found being increased at high deposition temperatures. The rootmeansquared surface roughness of the coatings was about 4 nm.

关 键 词：Pulsed laser deposition Boron carbon nitride MICROHARDNESS Surface morphology 

分 类 号：TG174.445[金属学及工艺—金属表面处理] TG174.44[金属学及工艺—金属学]