Pulsed excimer laser deposition and characterization of ferroelectric lead-zirconate-titanate thin films  

作　　者：陈逸清 郑立荣 张顺开 林成鲁 邹世昌 

机构地区：[1]Sate Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, China

出　　处：《Chinese Science Bulletin》1995年第4期340-344,共5页

基　　金：Research performed under the auspices of the Natural Scientific Foundation of Shanghai

摘　　要：The rapid development of ultralarge-scale integration demands integrated devices from ordinary 1-dimensional integrated devices to 3-dimensional devices and multi-function devices. Because of its non-volatility and radiation-hardness, very large (～1000) dielectric constant and polarizability, ferroelectric thin film and its application research have recently attracted great attention in newly functional materials and integrated devices such

关 键 词：PZT PULSED laser DEPOSITION (PLD) FERROELECTRIC thin film. 

分 类 号：O484[理学—固体物理]