硅压阻式压力传感器温度系数的在线实时补偿  

Real-Time Compensation Method on Line for Temperature Coefficient of a Piezoresistive Silicon Pressure Transducer

作　　者：刘君华[1] 张重斌 朱长纯[1] 

机构地区：[1]西安交通大学

出　　处：《传感技术学报》1989年第2期35-40,共6页Chinese Journal of Sensors and Actuators

摘　　要：在硅压阻式压力传感器与微机组成的数据采集系统中,利用软件编程很容易使传感器灵敏度及零位温度系数达到10^(-5)/℃数量级。文章分析了各种影响补偿精度的因素,除外部因素外,补偿精度受限于传感器本身的重复性及迟滞。此法简便易行,不需其他附加硬件的帮助。The user can easily keep the zero shift and the sensibility temperature coefficient to within 10-5 by using software programming in a data-acquisition system with piezoresistive silicon pressure transducer and microprocessor or computer. We discussed various factors influencing compensation accuracy in this paper, Except external factors, the compensation accuracy depands on the self repeatability and hysteresis of the pressure transducer. The temperature signal necessary to compensation can be self-measured by pressure transducer without another transducer. So other hardware for compensation is not necessary In this way for temperaturel compensation, it is easily and convenniently.

关 键 词：传感器 灵敏度 零位 温度系数 补偿 

分 类 号：TP212-55[自动化与计算机技术—检测技术与自动化装置]