纳米ZnO镶嵌SiO2薄膜的光学特性研究  

Optical properties of nano-ZnO embedded SiO_2 films

作　　者：薛华[1] 徐小丽[2] 陈彦[1] 张国恒[1] 马书懿[2] 

机构地区：[1]西北民族大学电子材料国家民委重点实验室,甘肃兰州730030 [2]西北师范大学物理与电子工程学院,甘肃兰州730070

出　　处：《功能材料》2009年第4期700-703,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(10874140);国家民委科研资助项目(02XB08);甘肃省自然科学基金资助项目(0803RJZA008);西北民族大学校中青年科研基金资助项目(X2006-01)

摘　　要：采用射频反应磁控溅射法在玻璃衬底上成功制备出纳米ZnO镶嵌SiO2非晶薄膜,利用X射线衍射仪、场发射扫描电子显微镜、X射线光电子能谱仪和紫外-可见分光光度计研究了纳米ZnO镶嵌SiO2薄膜相比纯ZnO纳米薄膜结构的变化及镶嵌结构对其光学特性的影响。研究发现与纯ZnO纳米薄膜相比,纳米ZnO镶嵌SiO2薄膜结构样品呈非晶结构,在紫外区光吸收系数以及光学带隙明显增大,光吸收以及光学带隙的变化与样品制备的衬底温度有关。研究结果表明,由于SiO2的特殊结构实现了对纳米ZnO的束缚,减少了ZnO纳米粒子的集聚,使得量子限制效应变得显著,导致复合膜光学带隙的明显增大以及吸收边的蓝移。Nano-ZnO embedded SiO2 thin films were prepared on glass substrates by RF co-reactive magnetron sputtering, changes of the structure and optical properties of composite films compared with pure ZnO thin film were characterized by X-ray diffraction （XRD）, field-emission scanning electron microscope （FESEM）, X-ray photoelectron spectroscopy （XPS） and UV-visible spectroscopy, and effect of the substrate temperatures on the optical properties of ZnO-SiO2 thin films was studied. The results showed that the nano-ZnO embedded SiO2 thin films were amorphous, the optical absorption coefficient increased significantly in UV region, the optical band gap values increased evidently compared with the pure ZnO film. The significant increase of the band gaps and the significant blue shift of the optical absorption edges of the ZnO-SiO2 composites were induced by the quantum size effect and the peculiar structure of the SiO2 which astricted ZnO nano particles, decrease of the ZnO size made the quantum confinement effect more evident. Besides, it was found that the band gap values and the absorption edges of the ZnO-SiO2 composites have relationship with preparing parameters, such as the substrate temperature.

关 键 词：纳米ZNO SIO2 射频磁控溅射 X射线衍射 光学特性 

分 类 号：O484[理学—固体物理] O433.4[理学—物理]