基于光纤阵列的二维微角位移传感器  

Two-Dimensional Micro-Angular Displacement Measurement Based on Fiber Arrays

作　　者：赵婷婷[1] 赵勇[1] 张毅[1] 

机构地区：[1]清华大学自动化系,北京100084

出　　处：《光学学报》2009年第4期874-878,共5页Acta Optica Sinica

基　　金：国家自然科学基金(50575111;60704026)资助项目

摘　　要：提出了一种基于光纤阵列的二维微角位移传感器。该传感器采用由十字形排列的光纤阵列构成的轮辐式探头结构。各接收光纤接收光强随被测角位移改变。通过对各光纤接收光强进行高斯拟合确定反射光斑中心位置。这种测量方法可以有效降低表面反射系数变化、光源波动以及环境光对测量结果的影响。由于各接收光纤对应光路损耗不同对微角位移测量精度产生影响，提出了光路损耗的归一化修正方法。实验证明系统测量角度范围-0．16rad-0．16rad，归一化修正方法使系统测量分辨率提高到了3．8×10^-4rad。A fiber optic sensor for two-dimensional angular displacement measurement is proposed. Linear light receiving fiber arrays arranged as a crisscross spoke are used in the sensor probe. Light intensity received by each fiber will change due to the measured angular displacement and be recorded by the CCD. Based on the Gaussian distribution theory the reflected light spot center can be determined by fitting a Gaussian curve according to received light intensity and position of each fibers. With this method, measurement errors caused by surface reflection index variation, light power fluctuation, and ambient light disturbance can be effectively avoided. The measured angle range is -0. 16 rad-0.16 rad. The difference of optical path loss of each receiving fiber reduces the measurement accuracy of this system. The proposed method based on the correction of optical path loss corresponding to each fiber can effectively improve the angular measurement resolution to 3.8 × 10^-4 rad.

关 键 词：光纤光学 光纤传感器 角位移传感器 光纤阵列 高斯光束 光路损耗 

分 类 号：O431.1[机械工程—光学工程]