尺蠖型压电旋转驱动器的静动态特性研究  

Static and dynamic performance of inchworm-type piezoelectric rotary actuator

作　　者：赵宏伟[1] 吴博达[1] 程光明[1] 杨志刚[1] 刘建芳[1] 曾平[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《哈尔滨工业大学学报》2009年第3期125-129,共5页Journal of Harbin Institute of Technology

基　　金：国家高技术研究发展计划资助项目(2002AA423150);国家自然科学基金资助项目(50475010);高校博士学科点专项基金资助项目(20050183020)

摘　　要：提出一种以压电叠堆为动力转换元件基于尺蠖驱动机理的精密旋转驱动器方案,驱动器定子上的传动单元均采用直角柔性铰链,对柔性铰链力学特性进行了分析,并建立了柔性铰链空间力学模型.对驱动器工作原理进行了分析,采用MSC Patran/Nastran软件对机械结构进行了仿真分析;并对所开发的驱动器样机进行了实验测试.测试结果与理论分析结果基本相符,所开发的驱动器样机具有定位精度高(单步绝对误差率<2%),性能稳定、可靠等优点,可望在超精密加工、精密光学等领域得到应用.A kind of new-type precision rotary actuator using piezoelectric stack as actuating element was put forward, based on inchworm motion principle. The right-angle flexure hinges were used as transmission elements. The performance of flexure hinge was analyzed and a 3D mechanics model was established. The working principle of the actuator was studied, and the finite element simulation of the mechanism was carried out by MSC Patran/Nastran software. A prototype actuator was tested by experiment. Test results were in good a- greement with theoretical analysis results essentially. The designed actuator has the advantages of high positioning accuracy （absolute positioning error ratio for single step less than 2% ）, stable performanee and so on, and can be applied to the ultraprecision machining, precision optics, etc.

关 键 词：精密转动 压电叠堆 有限元仿真 柔性铰链 尺蠖运动 

分 类 号：TN384[电子电信—物理电子学] TH703.6[机械工程—仪器科学与技术]