A high-efficiency high-power evanescently coupled UTC-photodiode  

作　　者：张云霄 廖载宜 赵玲娟 朱洪亮 潘教青 王圩 

机构地区：[1]Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Science

出　　处：《Journal of Semiconductors》2009年第4期51-54,共4页半导体学报（英文版）

基　　金：supported by the National High Technology Research and Development Program of China (Nos. 2006AA01Z256, 2007AA03Z419,2007AA03Z417);the State Key Development Program for Basic Research of China (Nos. 2006CB604901,2006CB604902);the Nati-onal Natural Science Foundation of China (Nos. 90401025,60736036,60706009, 60777021)

摘　　要：The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier （UTC） photodiode structures are reported. Two kinds of evanescently coupled uni-traveling carrier photodiodes （EC-UTC-PD） were designed and characterized： one is a conventional EC-UTC-PD structure with a multimode diluted waveguide integrated with a UTC-PD; and the other is a compact EC-UTC-PD structure which fused the multimode diluted waveguide and the UTC-PD structure together. The effect of the absorption behavior of the photodiodes on the efficiency and saturation characteristics of the EC-UTC-PDs is analyzed using 3-D beam propagation method, and the results indicate that both the responsivity and saturation power of the compact EC-UTC-PD structures can be further improved by incorporating an optimized compact multimode diluted waveguide.The effects of the multimode diluted waveguide on quantum efficiency and saturation behavior of the evanescently coupled uni-traveling carrier （UTC） photodiode structures are reported. Two kinds of evanescently coupled uni-traveling carrier photodiodes （EC-UTC-PD） were designed and characterized： one is a conventional EC-UTC-PD structure with a multimode diluted waveguide integrated with a UTC-PD; and the other is a compact EC-UTC-PD structure which fused the multimode diluted waveguide and the UTC-PD structure together. The effect of the absorption behavior of the photodiodes on the efficiency and saturation characteristics of the EC-UTC-PDs is analyzed using 3-D beam propagation method, and the results indicate that both the responsivity and saturation power of the compact EC-UTC-PD structures can be further improved by incorporating an optimized compact multimode diluted waveguide.

关 键 词：EC-UTC-PD multimode diluted waveguide space-charge effect thermal effect 

分 类 号：TN32[电子电信—物理电子学]