测量微球覆层厚度的X射线衍射法  

An X-ray diffraction method of measuring the coating thickness of micro balls

作　　者：周上祺[1] 石泉[1] 任勤[1] 彭倩[2] 应诗浩[2] 

机构地区：[1]重庆大学材料科学与工程学院,重庆400030 [2]中国核动力研究设计院核燃料及材料国家级重点实验室,四川成都610041

出　　处：《重庆大学学报（自然科学版）》2009年第4期392-395,401,共5页Journal of Chongqing University

基　　金：核燃料及材料国家级重点实验室基金项目（W05-11）

摘　　要：对采用X射线衍射测量微球覆层厚度的方法进行了研究，首先在建立微球X射线衍射数学模型的基础上，利用一组已知厚度和X射线衍射线积分强度的标样，通过计算机模拟求解的方法，得到微球衍射线积分强度和覆层厚度的关系。然后，在相同条件下进行待测试样的X射线衍射实验，将其衍射线积分强度代入求解模型得到的结果中就能得到待测试样的覆层厚度。实验结果表明，X射线衍射法是可行的，具有快速、方便、非破坏、不接触等特点。An X-ray diffraction method used to measure the coating thickness of micro ball is investigated. A mathematical model of X-ray diffraction of micro balls is created and solved by computer simulation; the relationship between the intensity of diffracted X-rays and the coating thickness is calculated with the help of a standard sample of known thickness. Based on that relationship, the coating thickness of other samples subsequently could be calculated using the intensity of diffracted X-rays. The experimental results show that this method is fast, convenient and nondestructive.

关 键 词：微球 厚度测量 X射线衍射法 计算机模拟 

分 类 号：TG806[金属学及工艺—公差测量技术]