大型多晶硅还原炉的温度场模拟  

The temperature simulation in large-scale polycrystalline silicon furnace

作　　者：管俭[1] 赖喜德[1] 刘东旗[2] 王建录[2] 

机构地区：[1]西华大学能源与环境学院,成都610039 [2]东方汽轮机有限公司,德阳618201

出　　处：《机械设计与制造》2009年第4期95-97,共3页Machinery Design & Manufacture

基　　金：四川省教育厅自然科学基金重点项目(07ZA116);四川省科技支撑计划重点攻关项目(2008GZ0072)

摘　　要：为了提高多晶硅还原炉结构设计的安全性和指导运行过程中的冷却系统调节控制,需要全面了解在工作过程中各部件的温度分布。结合大型多晶硅还原炉研制要求,对多晶硅还原炉的辐射、导热和对流的传热过程进行传热耦合温度模拟方法研究。采用Unigraphics?建立多晶硅还原炉三维整体模型,在ANSYS CFX数值仿真平台上进行炉膛内的辐射换热、炉夹层的冷却流道冷却水系统的对流换热、炉壁各结构件的导热过程中的温度计算仿真。通过与产品设计物理模型进行比较,表明温度场数值模拟的可靠性和准确性,可以用于指导工艺参数控制。另外温度场数值模拟结果可以供还原炉设计过程中进行热结构耦合分析,以对高温高压下工作的还原炉进行安全性评估。In order to ensure the safety of the structure design for the polycrystalline silicon reduction furnace and conduct the regulating and controling of the cooling systems in operation,it is nesscessary to master the temperature distribution of all parts in operation comprehensively. It describes the reasarch of the heat transfer coupling temperature simulation invovled radiation,heat conduction and convection,which is combined with the R＆D of a Large-Scale polycrystalline silicon furnace. The 3-dimentional model is constructed by Unigraphics and the temperature calculating contained radiative heat transfer inside the hearth,the convective heat transfer in the cooling systems and heat conduction in all metal and non-metal parts are carried on the numerical simulation bench of ANSYS CFX. By Comparing with the physical model of the furnace,it has shown that the temperature simulation is enough reliable and accurate to conduct the control of the technological parameters. The results of the simulation could be used as the temperature boundary conditions in the thermal-structure coupling analysis ,which could be used to evaluate the safety of furnace under working condition of the high temperature and high pressure.

关 键 词：大型多晶硅还原炉 温度模拟分析 ANSYSCFX~ 

分 类 号：TH16[机械工程—机械制造及自动化] O736[理学—晶体学]