磁控溅射Pt薄膜织构的X射线衍射分析  

X-ray diffraction analysis of Pt film prepared by magnetron sputtering method

作　　者：刘超前[1] 李伟力[1] 费维栋[1] 

机构地区：[1]哈尔滨工业大学材料科学与工程学院,哈尔滨150001

出　　处：《南京大学学报（自然科学版）》2009年第2期135-138,共4页Journal of Nanjing University（Natural Science）

摘　　要：本文利用X射线衍射技术表征了磁控溅射Pt薄膜的纤维织构.并给出了一种表征薄膜纤维织构的一般性方法.研究结果表明,利用X射线衍射的特殊扫描方式可以实现薄膜纤维织构的定量和定性表征.对于制备态Pt薄膜而言,织构漫散;400℃退火后,薄膜{111}型纤维织构变强,表明Pt薄膜的强{111}织构系退火时薄膜的再结晶所致.The fiber type texture of Pt film prepared by magnetron sputtering method was studied, and a method for the characterization of the film fiber texture was presented. The results indicate that the fiber texture in films can be characterized using the special X-ray diffraction technique. The texture in as-sputtered Pt film is diffused. After annealing at 400 C for 5 min, the texture degree of the film becomes very strong. Therefore, the highly fiber tex- ture in annealed Pt film is considered as the result of the recrystallization during the annealing process.

关 键 词：薄膜 PT 织构 X射线衍射 

分 类 号：O484.5[理学—固体物理]