电液动力微泵的实验分析  

EXPERIMENTAL ANALYSIS ON EELECTRO-HYDRODYNAMIC MICROPUMP

作　　者：于翮[1] 张强[1] 俞坚[1] 马重芳[1] 

机构地区：[1]传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京100022

出　　处：《工程热物理学报》2009年第5期857-859,共3页Journal of Engineering Thermophysics

基　　金：国家自然科学基金资助项目(No 50676001)

摘　　要：本实验运用MEMS技术在硅片上加工了一种新型电子冷却微泵—电液动力微泵,微泵由一组平面电极组成,施加直流来驱动流体。相关实验研究表明微泵的性能与施加电压、工作介质,电极结构和材料以及工作环境有关。A novel electronics cooling technology-electrohydrodynamic （EHD） micropump was fabricated. The EHD micropump was designed with an array of planar comb finger electrodes and driven by DC voltage, The testing result indicates that the pumping performance is proportional to the input voltage and inverse proportion to the channel height, the fluid with high permittivity and low viscosity will increase the pumping performance, and the cleanness degree of device will greatly influence EHD micropump ageing and effect.

关 键 词：电子冷却 微型电液动力泵 实验分析 

分 类 号：TK124[动力工程及工程热物理—工程热物理]