难混溶体系Al/Pb金属多层膜的Pb膜微观形貌和生长方式  

Surface Morphology and Growth Pattern of Pb Film in Al/Pb Multilayer of Immiscible Alloy System

作　　者：段林昆[1] 孙勇[1] 郭中正[1] 沈黎[1] 

机构地区：[1]昆明理工大学云南省新材料制备与加工重点实验室,昆明650093

出　　处：《材料导报》2009年第8期14-17,共4页Materials Reports

基　　金：云南省自然科学基金资助项目(2004E0004Z;2006E0018Q)

摘　　要：用磁控溅射法在载玻片上镀制了难混溶体系Al/Pb金属纳米多层膜,考察了调制波长对Pb膜成膜的影响,借用Philip XL370型扫描电子显微镜研究了成膜质量、表面形貌及膜层断面结构形貌,并采用X射线观测了样品中Al、Pb相的存在形式和膜层结构变化。结果表明,当Pb膜达到一定厚度时,可得到均一、致密的难混溶体系Al/Pb金属纳米多层膜。探讨了膜的形成机理,给出了成核过程模型,并进一步修正了传统成膜机制。Immiscible system of Al/Pb metal nano-multilayer is obtained through magnetron sputtering depositing on glass slides. The relationship between the wavelength and the film formation of Pb muhilayer is researched. The film properties, surface appearance and structure of the cross section are investigated by Philip XL370 scanning electron microscopy. The phase existence of Al and Pb and the change of the film structure are observed by X-ray. It indicates that thick homogeneous immiscible alloy system of Al/Pb multilayer can be obtained while the film is getting to a certain thickness. The model of the nucleation process is presented in the paper. The formation mechanism of the film is also discussed and traditional mechanism is refined.

关 键 词：难混溶体系 Al/Pb金属纳米多层膜 成膜质量 表面形貌 

分 类 号：TB43[一般工业技术]