能量和角度多道的环形电子能谱仪的性能研究  

The Performance Study of a Toroidal Angle and Energy Dispersive Multichannel Electron Energy Spectrometer

作　　者：周霞[1] 徐春凯[1] 魏征[1] 刘文杰[1] 李继伟[1] 陈向军[1] 徐克尊[1] 

机构地区：[1]合肥微尺度物质科学国家实验室,中国科学技术大学近代物理系,安徽合肥230026

出　　处：《核电子学与探测技术》2009年第2期453-458,共6页Nuclear Electronics & Detection Technology

基　　金：国家自然科学基金(No.10404026);教育部“211工程”项目

摘　　要：对以探测极角为90°、方位角收集范围为245°的环形电子能量分析器(TEEA)为基础的电子能谱仪的性能进行了研究,通过实验系统地研究了各电子光学单元的电位对谱仪能量分辨、能量线性以及线性能窗宽度的影响。同时对谱仪的能量分辨进行了深入的讨论,着重分析了仪器的角度非轴对称性对能量分辨的影响,并提出了对它的修正方法。这些对谱仪的进一步发展及将谱仪运用到固体表面能谱学和微区原子识别的研究中都有一定的意义。In this article, we reported the study on the performance of a spectrometer based on a TEEA which could detect the electrons outgoing in the plane perpendicular to the incident electron beam in a wide azimuth angle range of 245° simultaneously. The energy resolution, energy linearity and energy window of the spectrometer were studied systematically by experiment, and the influence of the voltages on the electrodes of the input lens and output lens were investigated Further discussion on the energy resolution was carried out. The influence of the axial asymmetry was quantitatively investigated, and a calibration method was proposed. These studies are significant to this spectrometer for its further development and for its usage on energy spectroscopy of surface at microscale.

关 键 词：环形电子能量分析器 能量分辨 线性能窗 非轴对称性 

分 类 号：O485[理学—固体物理]