无铅压电陶瓷薄膜的制备及应用研究  

Studies on preparation and applications of lead-free piezoelectric ceramic films

作　　者：陆雷[1,2] 肖定全[1] 田建华[2] 朱建国[1] 

机构地区：[1]四川大学材料科学与工程学院,四川成都610064 [2]中国工程物理研究院,四川绵阳621900

出　　处：《功能材料》2009年第5期705-708,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50410179,50772088)

摘　　要：无铅压电陶瓷的制备和应用是过去10年左右国际上研究的热点之一。近年来,由于无铅压电陶瓷薄膜可望在信息、传感、航空、机械、生物、医学等行业获得广泛应用,这类薄膜的制备和应用研究也已引起国际上的关注,并推动着无铅压电陶瓷薄膜材料和制备技术的不断发展。结合作者的研究工作,概括介绍了无铅压电陶瓷薄膜材料的研究进展,包括主要的无铅压电陶瓷薄膜材料;这类薄膜的主要制备方法,特别是射频磁控溅射法、脉冲激光沉积法和溶胶-凝胶法;以及无铅压电陶瓷薄膜材料可能的器件应用。Preparation and applications of lead-free piezoelectric ceramics were one of the international active research areas since the middle of 1990＇s. In recent years, lead-free piezoelectric films have been promising used in information industry, sensor, aerospace, mechanical industry, biology, medicine and so on. Therefore the preparation and applications of the films have been concerned internationally. In this paper, combined with the authors＇ research work, the progresses of lead-free piezoelectric films are introduced, including the progresses of the lead-free piezoelectric ceramic films; the fabrication methods especially the RF magnetron sputtering, pulsed laser deposition and sol-gel process for lead-free piezoelectric films; and the potential applications for devices.

关 键 词：无铅压电陶瓷薄膜 薄膜制备技术 薄膜器件 

分 类 号：TB43[一般工业技术]