内嵌永磁体阵列的柔性振动膜微型电磁驱动器的设计与制作工艺  

Design and Fabrication of a Micro Electromagnetic Actuator Based on PDMS Diaphragm Embedded Hard Magnets

作　　者：苏宇锋[1] 段智勇[1] 郑鹏[1] 刘武发[1] 陈文元[2] 

机构地区：[1]郑州大学,河南郑州450001 [2]上海交通大学微纳科学技术研究院,上海200030

出　　处：《仪表技术与传感器》2009年第4期58-61,共4页Instrument Technique and Sensor

基　　金：教育部博士点基金项目(20010248001)

摘　　要：提出了一种基于硅橡胶薄膜(PDMS,polydimethyl siloxane)和CoNiMnP永磁体阵列的双向微型电磁驱动器,由振动膜层和线圈层两层构成。对该驱动器进行了理论分析与数值模拟,二者结果基本一致,振动膜中心最大挠度的分析误差为7.96%.着重探讨了内嵌磁体阵列的PDMS振动膜的电镀工艺,磁体阵列中每一个小磁体块的尺寸为50μm×50μm×20μm,其矫顽力、剩磁和最大磁能积分别为208.73 kA/m,0.2 T和10.15 kJ/m3.A bi-direetional electromagnetic microactuator, which was composed of an integrated planar coil and a flexible polydimethyl siloxane （PDMS） diaphragm embedded permanent magnets was presented. Theoretical and numerical methods were adopted to analyze the geometrical parameters of the diaphragm of the microactuator. There is a deviation of 7. 96% between the two methods. Electro-plating under external magnetic field was carried out to improve the magnetic properties of the electroplated magnet, including coercivity, remanenee and magnetic energy and so on. The magnet post is 50 μm × 50μm × 20 μm , and the measured maximum eoercivity, remanence and maximum magnetic energy are 208.73 kA/m, 0. 2 T and 10. 15 kJ/m^3. Using the electroplating of magnet, the fabrication process of the microactuator is compatible with MEMS process.

关 键 词：微驱动器 电磁驱动 硅橡胶(PDMS) 电镀 

分 类 号：TP215[自动化与计算机技术—检测技术与自动化装置] TP271[自动化与计算机技术—控制科学与工程]