直线驱动系统中前馈质量与电机常数校准研究  

Research on Calibrating Feedforward Mass & Motor Constant for Linear Driving System

作　　者：滕伟[1] 周云飞[1] 朱庆杰[2] 

机构地区：[1]华中科技大学国家数控系统工程技术研究中心,湖北武汉430074 [2]宝山钢铁股份有限公司,上海201900

出　　处：《电气传动》2009年第5期43-46,共4页Electric Drive

基　　金：国家自然科学基金项目(50245011);国家重点基础研究发展计划资助项目(2003CB716206)

摘　　要：针对直线驱动系统,提出一种新的加速度前馈控制策略及前馈质量与电机常数的校准算法。首先,对传统前馈控制与新的控制策略之优缺点进行了对比,又介绍了直线驱动中的运动控制系统,提出一种精确计算前馈质量与电机常数的校准算法,以补偿传统前馈控制中的不足。实例证明该前馈策略与校准算法能有效提高系统的动态和稳态性能,满足高速、高精度的运动要求。该算法已成功应用于以直线驱动为主导的半导体加工设备中。A novel acceleration feedforward control strategy and a calibration algorithm on feedforward mass and motor constant were proposed for linear driving system. First, a comparison was done between the conventional feedforward control and the novel one about the advantages and disadvantages. Then, a motion control system for linear driving was described. And a calibration algorithm on feedforward mass and motor constant was proposed to compensate the disadvantages in conventional feedforward control. Experimental re- sults demonstrate that this algorithm can enhance the dynamic response and steady characteristic to satisfy the requirements of high velocity and high precision. This algorithm has already been applied in semiconductor manufacturing equipments supported by linear driving.

关 键 词：直线驱动 前馈控制 前馈质量 电机常数 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]