光湿度传感器的折射率感湿机理  

Optical humidity-sensitive mechanism based on refractive index variation

作　　者：王珍媛[1] 顾铮先[2] 

机构地区：[1]上海理工大学光学与电子工程信息学院,上海200093 [2]上海理工大学理学院,上海200093

出　　处：《传感器与微系统》2009年第5期68-71,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60777035);教育部科学技术研究重点计划资助项目(208040);上海市教育委员会科研计划资助项目(07ZZ87);上海市重点学科建设项目(T0501)

摘　　要：在综合分析了M axwell-Garnett理论和有效介质理论的基础上,针对半导体湿敏陶瓷材料提出了一种新颖的复合模型,给出了以吸附参数和陶瓷材料气孔率为变量的薄膜折射率随湿度变化的理论关系。随着吸附参数的增大,S iO2薄膜的折射率增大;随着陶瓷材料气孔率的增大,S iO2薄膜的折射率将减小。利用薄膜折射率的变化检测湿度,灵敏度可以达到10-3数量级。通过计算机理论模拟与A lberto A H等人所做的实验结果对比,证明了该模型的正确性。A novel composite model is put forward for semiconductor humidity-sensitive ceramic material based on Maxwell-Garnett and effective medium theory, and analytical expression of the relation between effective refractive index and relative humidity is showed with different absorption factors and porosities. The lager the absorption factor is, the higher the refractive index is. Refractive index of humidity-sensitive film SiO2 decreases with the increase of ceramic material porosity. The sensitivity of optical humidity sensor is available to magnitude of 10 ^-3. In contrast to the experimental humidity-sensing curve of Alberto A H et al,the analysis of mechanism,theoretical simulation is in agreement with experimental results. So this composite model is proved to be reasonable.

关 键 词：光湿度传感器 感湿机理 有效折射率 复合模型 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]