可见与近红外增透膜的设计和制备  

Design and fabrication of visible and infrared band broadband AR coating

作　　者：张家斌[1] 付秀华[1] 贺才美[1] 

机构地区：[1]长春理工大学,吉林长春130022

出　　处：《激光与红外》2009年第5期528-530,共3页Laser & Infrared

摘　　要：为满足大气辐射系统中光学元件的使用要求,即可见与近红外波段高透过,根据双有效界面法设计原理配合膜系软件设计膜系,采用离子辅助沉积,电子束真空镀膜的方法,通过对工艺参数的调整和监控方法的改进,制备400-1200 nm宽带增透膜。所镀膜层在垂直入射时,400-1200 nm波段平均反射率小于1%。同时对膜层牢固性进行了测试,满足大气辐射系统的使用要求。In order to meet the optical instruments＇ operating requirements of atmospheric radiation systems, namely, it must be high transmittance during visible and near-infrared band, we adopt electronic beaming vacuum depositing method with the aid of ion assistant deposition systems. The structure is designed by TFC software with double efficiency interface theory. Through optimizing technical parameters and improving the monitor method ,we deposit the film on the substrate. In condition of vertical incidence, the average reflectivity below 1% through 400 - 1200nm wavelength. In addition, the coating have successfully passed environmental tests, it can completely meet the demands of atmospheric radiation systems.

关 键 词：光学薄膜 大气辐射系统 宽带增透膜 离子辅助 

分 类 号：O484.1[理学—固体物理]