A novel MEMS inertial sensor with enhanced sensing capacitors  

作　　者：董林玺 颜海霞 霍卫红 许立 李永杰 孙玲玲 

机构地区：[1]Key Laboratory of RF Circuits and Systems,Ministry of Education,Hangzhou Dianzi University [2]Toshiba Hydro-Electro Equipments Company

出　　处：《Journal of Semiconductors》2009年第5期36-42,共7页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.60506015);the Zhejiang Provincial Natural Science Foundation of China(No.Y107105)

摘　　要：A novel MEMS inertial sensor with enhanced sensing capacitors is developed. The designed fabricated process of the sensor is a deep RIE process, which can increase the mass of the seismic to reduce the mechanical noise, and the designed capacitance sensing method is changing the capacitance area, which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision, and reduce the electronic noise by increasing the sensing voltage to improve the resolution. The design and simulation are also verified by using the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is approximately equal to zero. Finally, the fabricated process based on silicon-glass bonding and the preliminary test results of the device for testing grid capacitors and the novel inertial sensor are presented. The testing quality factor of the testing device based on the slide-film damping effect is 514, which shows that the enhanced capacitors can reduce mechanical noise. The preliminary testing result of the sensitivity is 0.492pf/g.A novel MEMS inertial sensor with enhanced sensing capacitors is developed. The designed fabricated process of the sensor is a deep RIE process, which can increase the mass of the seismic to reduce the mechanical noise, and the designed capacitance sensing method is changing the capacitance area, which can reduce the air damping between the sensing capacitor plates and reduce the requirement for the DRIE process precision, and reduce the electronic noise by increasing the sensing voltage to improve the resolution. The design and simulation are also verified by using the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is approximately equal to zero. Finally, the fabricated process based on silicon-glass bonding and the preliminary test results of the device for testing grid capacitors and the novel inertial sensor are presented. The testing quality factor of the testing device based on the slide-film damping effect is 514, which shows that the enhanced capacitors can reduce mechanical noise. The preliminary testing result of the sensitivity is 0.492pf/g.

关 键 词：capacitive accelerometer inertial sensor high precision DRIE 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]