EXL能谱仪薄样品X线的定量分析  

THE QUANTITATIVE ELECTRON MICROANALYSIS OF THIN SECTIONS USING EXL─TYPE EDX

作　　者：文慕冰[1] 

机构地区：[1]武钢技术中心

出　　处：《钢铁研究》1998年第3期43-47,共5页Research on Iron and Steel

摘　　要：研究了Link公司能谱仪中RTS软件（薄膜定量分析软件）可靠性及适用性。实验结果表明：RTS软件定量分析结果误差较小。但对C、N、O等轻元素定量分析，试样厚度小于1500以下时，结果才比较可靠。The present work examines the reliability and suitability of software for quantitative electron microanalysis of thin sections (it is RTS software) using Exl type single window energy dispersive X-ray (EDX) detector. It is found that the error of quantitative analysis is less for the RTS software,but only if the thickness of specimen is less than 1500A,the quantitative analysis result using RTS software is reliability for light elements such as C,N,O element.

关 键 词：薄膜 定量分析 误差 能谱 化学分析 

分 类 号：O657[理学—分析化学]