哈特曼像差自动测量系统设计与开发  

Design and Development of Hartmann Spherical-Aberration Automatic Measurement System

作　　者：李建新[1] 

机构地区：[1]武汉软件工程职业学院光电子与通信工程系,武汉430205

出　　处：《半导体技术》2009年第4期355-360,共6页Semiconductor Technology

基　　金：武汉市市属高等学校2006年度科学研究项目(武教高[2006]5号)

摘　　要：研究了哈特曼物镜自动测量的系统结构,包括哈特曼球差测量的光学系统、面阵CCD图像采集系统和光栅位移测量系统。深入讨论了数字图像处理、测量与识别的软件设计方案,进行实验与误差分析。关于数字图像处理、测量与识别的软件设计的讨论,有许多独到之处。解决了系统设计所遇到的关键技术,解决如何在一维图像存储器中准确地寻找二维图像目标,找到了目标之后如何进行有关的目标计算,提高了求解的可计算性。The system architecture of Hartmann objective lens automatic measurement was studied, including Hartmann spherical aberration measurement of optical system and systems of area array CCD image collection and pattern displacement. Digital image processing, measurement and recognition of the software design decision were discussed. The measurement of pattern displacement and computer interface circuitry for experiments and error analysis were designed. Many unique views were given about digital image processing, measurement and recognition in the exploration of software design and the research focuses were expressed. The key technologies during the course of system design were solved. How to seek two-dimensional image goals in the one-dimensional images ROM and how to calculate it do after finding relative target were solved so it can improve the circularity.

关 键 词：球差 哈特曼 CCD图像传感 光栅位移 图像处理 

分 类 号：TN911.73[电子电信—通信与信息系统]