高精度高测速双纵模热稳频激光干涉仪研究  

Study of High Precision and High Measurement Speed Dual-Longitudinal Thermal Frequency Stabilization Laser Interferometer

作　　者：周秀云[1,2] 张涛[2] 程玉华[1] 

机构地区：[1]电子科技大学自动化学院,成都610054 [2]四川大学激光应用技术研究所,成都610065

出　　处：《电子科技大学学报》2009年第3期451-454,共4页Journal of University of Electronic Science and Technology of China

基　　金：国家自然科学基金(50275101);四川省科技攻关项目(03SG1230)

摘　　要：现代机械工业的发展使得数控机床和三坐标测量机等的运行速度已经达到1000mm/s,而目前商用外差干涉仪的测量速度不能满足这一要求。为此该文采用长度为206mm、频差约728MHz的普通全内腔He-Ne热稳频激光器为光源,外加带有高频振荡器形成的交流信号进行脉冲计数的信号处理电路,构成高精度高速双纵模热稳频激光干涉仪。通过实验对干涉仪的测量速度和精度进行了验证,其精度达到0.1μm/800mm。实验证明,该干涉仪可以对速度为1000mm/s的运动物体进行位移和速度测量。The moving speed of the numerical control machine tool and the three-COMERO has reached 1 000 mm/s. However, the present measurement speed of the commercial heterodyne interferometer can not meet the requirement of measuring the moving speed. A High precision and high measurement speed dual-longitudinal thermal frequency stabilization laser interferometer is presented. This interferometer uses a laser of 206 mm-long and beat-frequency 728 MHz and a high frequency oscillator of high stability to get AC counter pluses. Experiments are set up to testify the measurement speed and precision of the interferometer. The system＇s precision is 0.1 μm/800 mm. Results show that this kind of interferometer can be used to measure the displacement of an object whose velocity is 1 000 mm/s.

关 键 词：双频激光干涉仪:频差:高精度高测速 热稳频激光器 

分 类 号：TH744.3[机械工程—光学工程]