基于FPGA的引线键合超声电源的研究  

Research of Ultrasonic Power Supply in Wire Bonding Based on FPGA

作　　者：蒋礼[1] 黎辉勇[1] 王福亮[2] 

机构地区：[1]中南大学物理学院,湖南长沙410083 [2]中南大学机电学院,湖南长沙410083

出　　处：《压电与声光》2009年第3期357-359,363,共4页Piezoelectrics & Acoustooptics

基　　金：国家"九七三"计划基金资助项目(2003CB716202);国家自然科学基金资助项目(50675227;50390064)

摘　　要：为进一步提高热超声引线键合超声电源的自动频率跟踪速度及精度，提出了基于现场可编程门阵列（FPGA）的超声电源设计方案。利用FPGA并行执行的特点，移位乘法器的流水线功能及数字增量式比例、积分及微分（PID）控制算法，缩短了回路控制时间，提高了自动频率跟踪的速度。采用高精度的直接数字频率合成（DDs）和数字锁相环技术，实现了高频率跟踪精度。实验表明，在空载及给定负载状态下，超声变幅杆从失谐状态到谐振状态仅需0．6～1．1ms；频率跟踪误差不超过±50Hz。To improve the speed and accuracy of automatic frequency tracking on thermosonic wire bonding, the design scheme based on FPGA was proposed. With the parallel operation of FPGA, pipelining of the multiplier, and digital increasing PID control method, the loop control time was reduced, so the speed of automatic frequency tracking has been effectively improved. DDS and digital phrase-lock technology have been applied in FPGA to improve the accuracy of frequency tracking. Experiments indicated that the process from mistuning to resonance for ultrasonic horn without loads and with the given loads only needed about 0. 6 - 1. 1 ms. The error of automatic frequency tracking was less than ±50 Hz.

关 键 词：现场可编程门阵列(FPGA) 超声电源 自动频率跟踪 直接数字频率合成(DDS) 

分 类 号：TN911.8[电子电信—通信与信息系统] TG453.9[电子电信—信息与通信工程]