烧结工艺对薄片单晶硅太阳电池弯曲的影响  

INFLUENCE OF FIRING PROCESS ON BOW OF THIN MONOCRYSTALLINE SILICON WAFERS FOR SOLAR CELLS

作　　者：孙振华[1] 杨德仁[1] 朱鑫[1] 汪雷[1] 李晓强[1] 曾俞衡[1] 阙端麟[1] 

机构地区：[1]浙江大学材料科学与工程系硅材料国家重点实验室,杭州310027

出　　处：《太阳能学报》2009年第5期615-618,共4页Acta Energiae Solaris Sinica

基　　金：国家自然科学基金(50572094);浙江省可再生能源利用技术专项(2006C1275)

摘　　要：通过在快速热处理(Rapid Thermal Processor,RTP)炉中模拟铝背烧结过程,研究了升温速率、烧结温度和降温速率等烧结工艺参数对薄片单晶硅太阳电池弯曲的影响。结果显示,增加铝熔化前和减少铝熔化后的处理时间、加快降温以及降低烧结温度都能减小电池片弯曲。这主要是由于这些烧结工艺参数影响了铝层的致密度和降温过程中AlSi熔体的过冷所致。在此基础上得出了减小电池片弯曲的合理烧结工艺。The influences of firing process parameters as firing temperature, ramping and cooling rate on the bow of thin monocrystalline silicon wafers for solar cells were studied. The firing process was simulated in Rapid Thermal Processor （RTP） furnace. It shows that bow of the wafers can be reduced by increasing and decreasing treatment time before and after alumnium melting, as well as accelerating cooling rate and lowering firing temperature, which are attributed to variation of the density of aluminium layer and the under cooling of AISi liquid. Proper firing processes aimed to reduce bow of solar cells was propesed.

关 键 词：单晶硅 太阳电池 弯曲 

分 类 号：TM914[电气工程—电力电子与电力传动]