Fe-C合金膜光纤腐蚀传感器的制作及性能研究  

Fabrication and performance of optical fiber corrosion sensor with Fe-C alloy film

作　　者：闫磊朋[1] 李威[1] 洪晓华[1] 蔡文娟[1] 

机构地区：[1]中国矿业大学机电工程学院,徐州221008

出　　处：《激光技术》2009年第3期252-255,共4页Laser Technology

基　　金：江苏省自然科学基金资助项目(BK2006037)

摘　　要：为了在光纤纤芯上制备更符合要求的 Fe-C 合金膜,取代了氢氟酸(HF)腐蚀包层的方法,选用刀笔去除光纤的涂覆层和包层;分别使用物理气相沉积离子溅射金及 Fe-C 合金、物理气相沉积真空蒸镀 Fe-C 合金、化学镀铜4种方法使纤芯表面金属化。经过对比分析,选择在金膜和铜膜上继续利用电镀方法沉积上不同厚度的 Fe-C 合金膜,进而进行腐蚀传感实验。最后利用新的实验数据记录方法,并通过实验中不同厚度的 Fe-C 合金膜表现出的传感特点,提出了一个腐蚀定量监测方案。结果表明,通过离子溅射金使纤芯金属化是一个相对较好的方法,这为 Fe-C 合金膜光纤腐蚀传感器的进一步发展开启了新思路。In order to obtain better Fe-C alloy film,a knife-pen was used to eliminate the coating and cladding of fibers effectively instead of conventional HF acid method. The fiber core was metallized by means of ion sputtering Au or Fe-C ,vacuum evaporating Fe-C,electroless plating Cu respectively. Then Fe-C film in different thickness was electroplated on the Cu film and Au film. After testing the sensing properties of the different thickness of Fe-C film, a new way was proposed to monitor corrosion quantitatively, a conclusion was drawn that the ion sputtering Au was the best way to metallize the fiber core, which should be helpful for the future research of the optical fiber corrosion sensor with Fe-C alloy film.

关 键 词：光纤光学 Fe—C合金膜制备 腐蚀实验 定量监测 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]