基于光子晶体高级次反射膜空间解复用器的研究  

Based on High-Level Reflectivity Thin Film Spatial Demultiplexer Research

作　　者：温凯[1] 黄永清[1] 段晓峰[1] 黄辉[1] 王琦[1] 

机构地区：[1]北京邮电大学光通信与光波技术教育部重点实验室,北京100876

出　　处：《电子器件》2009年第2期265-268,共4页Chinese Journal of Electron Devices

基　　金：国家"863"计划项目资助(2007AA03Z418)"用于可重构分插复用具有波长处理机制的平面光集成解复用接收器件的研究";高等学校学科创新引智计划资助(Supported by the 111 Project)(B07005);教育部长江学者和创新团队发展计划资助(IRT0609)

摘　　要：由于实际中多周期高反射膜空间解复用器的制备工艺的难度,根据"超棱镜"效应的多层薄膜空间解复用器的设计方法,提出了一种制备工艺简单的多层薄膜结构,以此来降低制备的工艺难度。制备通过增加周期中单层膜的级次来减少整个高反射膜系的周期数。所设计的高级次反射膜系为10(9H9L)9H,对设计的膜系进行了数值模拟计算,并和相同总物理厚度的一级次高反射膜系进行了比较。计算结果比较表明,该设计方法明显降低了工艺设计的要求,并具有较大的空间色散和实际制备意义。A new design method for multilayer thin film spatial demultiplexer based on Superprism phenomenon of periodic photonic crystal was presented. Without complex techniques the multilayer thin film structure was deposited easily with increasing the thickness of the single layer and decreasing the periodicity. The high-level relectivity thin film stack as 10（gHgL）gH was designed. By the above method and compared with the classic low-level high reflectivity thin film stack of the same geometric thickness, the numerical simulation and the computational results show that the spatial dispersion is large and the designed multiplayer structure is more feasible in practice for fabrication.

关 键 词：波分复用 空间色散 光子晶体 高反射膜 

分 类 号：O782.9[理学—晶体学] O734