基于模糊Petri网推理的半导体生产线动态调度研究  

Dynamic Scheduling for Semiconductor Wafer Fabrication Based on Fuzzy Petri Net Reasoning

作　　者：施斌[1] 乔非[1] 马玉敏[1] 

机构地区：[1]同济大学CIMS研究中心

出　　处：《机电一体化》2009年第4期29-32,40,共5页Mechatronics

基　　金：国家自然科学基金(No.70531020,No.60674076);国家教育部新世纪优秀人才支持计划项目(NCET-07-0622)

摘　　要：针对动态调度的特点，为了综合优化半导体生产线性能指标，尝试使用基于模糊Petri网推理的方法进行动态调度。首先分析了影响动态调度决策的生产线状态信息；然后建立了模糊Petri网形式化推理机，继而构建了面向半导体生产线的模糊Petri网推理模型；最后使用实际半导体生产线模型，将提出的方法与FIFO、EDD和CR策略进行了仿真比较。结果表明基于模糊Petri网推理的动态调度方法能够改善半导体生产线多种性能指标。Focusing on the features of dynamic scheduling,an approach based on fuzzy Petri net reasoning was presented to optimize the performance measures of semiconductor wafer fabrication. Analyzing the information of process line which has an affect on dynamic scheduling firstly,then a formal reasoning machine of fuzzy Petri net was constructed and a model based on fuzzy Petri net reasoning for semiconductor wafer fabrication was built. Finally, using real processing model and compared to FIFO,EDD and CR strategies,simulation results show that the proposed approach exhibits high performance in reducing mean cycle time, increasing on-time delivery and improving throughput.

关 键 词：半导体生产线 动态调度 模糊推理 PETRI网 

分 类 号：TN305[电子电信—物理电子学] TP18[自动化与计算机技术—控制理论与控制工程]