Optimal Synchronous Trajectory Tracking Control of Wafer and Reticle Stages  

作　　者：王春洪 胡金春 朱煜 尹文生 

机构地区：[1]Department of Precision Instruments and Mechanology, Tsinghua University,Beijing 100084, China

出　　处：《Tsinghua Science and Technology》2009年第3期287-292,共6页清华大学学报（自然科学版（英文版）

基　　金：Supported by the National Natural Science Foundation of China(No. 50577037)

摘　　要：An optimal synchronous trajectory tracking controller was developed for multi-axis systems. The position synchronization error on each axis was defined as the position difference between this axis and the following axes. The following error of each axis, the synchronization error, and its derivative were considered in the cost function. A Riccati equation was deduced from the Hamilton-Pontryagin equation. The optimal control law was set up from the Riccati equation solution. Simulations of a two-axis system show that the synchronization error can be significantly reduced and the synchronization performance can be adjusted based on the parameters in the cost function.An optimal synchronous trajectory tracking controller was developed for multi-axis systems. The position synchronization error on each axis was defined as the position difference between this axis and the following axes. The following error of each axis, the synchronization error, and its derivative were considered in the cost function. A Riccati equation was deduced from the Hamilton-Pontryagin equation. The optimal control law was set up from the Riccati equation solution. Simulations of a two-axis system show that the synchronization error can be significantly reduced and the synchronization performance can be adjusted based on the parameters in the cost function.

关 键 词：optimal control CROSS-COUPLING motion control synchronized scan 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]