基于硅微控阀门的气压控制器的设计  

Study and Design on Gas Pressure Control Method with Micro-Machined Silicon Micro-valves

作　　者：崔保健[1] 周德海[1] 

机构地区：[1]92493部队89分队

出　　处：《液压气动与密封》2009年第3期13-15,共3页Hydraulics Pneumatics & Seals

摘　　要：本文针对硅微控阀门的特性,提出了一种新的气体压力控制方法,设计了基于微机电硅微控阀门的气体压力控制系统,对系统的传感器调理电路、控制电路进行了设计,解决了小压力和低流量时的压力精密控制问题。该系统压力输出的范围为0～110kPa,不确定度为0.1%FS,气体压力控制稳定性达到了0.01%。可广泛用于模拟和数字压力计和航空气压仪表的校准检定。Based on characteristic of silicon microwaves, a new method of pneumatic pressure control is presented. A pneumatic pressure control system based on silicon micro valves is designed. The sensor electric circuit and control electric circuit is designed too. The little stream and los pressure control problem has been solved well. The pressure range is 0-110kPa, its accuracy is 0.1% FS, the stability of pressure control is 0.01%. This pressure controller can be widely used in calibration of analog or digital pressure gauge and aerial atmosphere instruments.

关 键 词：压力控制 阀门 微机电 

分 类 号：TP137.5[自动化与计算机技术—控制理论与控制工程]