近红外微型光谱仪光学系统设计与模拟  

Design and Simulation of the NIR Micro-Spectrometer Optical System

作　　者：王玲芳[1] 温志渝[1] 向贤毅[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆大学微系统研究中心,重庆400044

出　　处：《光谱学与光谱分析》2009年第6期1721-1725,共5页Spectroscopy and Spectral Analysis

基　　金：国家科技部国际合作项目(2006DFA13510,2007DFC00040);重庆市科技攻关计划项目(CSTC,2006AB2006)资助

摘　　要：基于光谱仪基本工作原理和光学设计理论,以系统微型化、且能满足一定光谱范围和分辨率要求为具体设计目标,提出了基于平面衍射光栅分光的交叉式C-T结构的近红外微型光谱仪光学系统结构方案。采用ZEMAX软件对近红外微型光谱仪的分光系统、成像系统进行了优化设计与模拟分析。最终设计与模拟分析结果表明,该光学系统光谱范围为900～1 700 nm,分辨率<10 nm,谱面展宽为12.74 mm,F数为8.128 388,系统体积为51.26 mm×41.81 mm×22 mm。Based on the working principle of analyzing spectrometer and the theory of optical design, to make the system miniature, and with a certain spectral range and resolution requirements as specific design objectives, a cross-C-T micro-structure based on a plane diffraction grating spectrophotometer of the near-infrared spectrometer was put forward; ZEMAX was used for design and optimizing and simulating analysis of micro-near-infrared spectrometer in the optical system. The result showed that the micro-optical system＇s spectral range was 900-1 700 nm, resolution was 〈10 nm, spectrum broadening was 12. 74 mm, F number was 8. 128 388, and the system volume was 51.26 mm×41.81 min×22 mm, and these all satisfy the requirements. It solved the micromation of the optical system of the spectrometer, and therefore, contributed to the micromation of the spectrometer itself.

关 键 词：微型光谱仪 衍射光栅 交叉式Czerny-Turner 分光系统 成像系统 

分 类 号：O438.1[机械工程—光学工程]