谐振腔增强型红外光电探测器的反射镜的分析与优化设计  

Analysis and Optimized Design of Reflectors for Resonant Cavity Enhanced Infrared Photodetectors

作　　者：周勇[1] 张晓霞[1] 王仕超[1] 王祥斌[1] 陈沛然[1] 冷洁[1] 

机构地区：[1]电子科技大学光电信息学院,四川成都610054

出　　处：《红外》2009年第6期1-4,共4页Infrared

基　　金：国家高技术研究发展计划(863计划)新材料领域(2009AA03Z413)

摘　　要：针对顶镜和底镜最上层厚度为二分之一中心波长的分布布拉格反射镜(DBR),引入了现代光学薄膜技术中"虚设层"的概念,并进行了详细的理论分析和说明。用传输矩阵法推导了DBR的反射率,对其顶镜和底镜的反射率在真实器件的条件下进行计算,仿真得到了采用不同的顶层厚度的DBR的反射率及其与Si-SiO_2层的对数、波长等的关系,证明了"虚设层"理论分析的正确性,对设计高性能谐振腔增强型红外光电探测器具有指导意义。＂ The concept of ＂absentee layer＂ in modern optical thin film technology is introduced into the Distributed Bragg Reflector （DBR）, the top and bottom mirrors of which have their top layers with a thickness of a half wavelength. The analysis and explanation are given in theory. The reflectivity of the ＇DBR is deduced by using a matrix method and the reflectivity of its top and bottom mirrors in a real device is calculated. Through simulation, the reflectivity of the DBR using different top layer thickness and ＂its relation with the pairs of Si-SiO2 layers and wavelength etc. are obtained. The simulation result shows that the theoretical analysis of the concept of ＂absentee layer＂ is correct ,and is of significance to the design of high performance resonant cavity enhanced infrared photodetectors.

关 键 词：谐振腔 DBR反射镜 传输矩阵 

分 类 号：TN215[电子电信—物理电子学]