High-performance evanescently-coupled uni-traveling-carrier photodiodes  

作　　者：张云霄 廖栽宜 王圩 

机构地区：[1]Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Chinese Physics B》2009年第6期2393-2397,共5页中国物理B（英文版）

基　　金：Project supported by the National High Technology Research and Development of China (Grant Nos 2006AA01Z256,2007AA03Z419 and 2007AA03Z417);the State Key Development Program for Basic Research of China (Grant Nos 2006CB604901 and 2006CB604902);the National Natural Science Foundation of China (Grant Nos 90401025,60736036,60706009 and60777021)

摘　　要：A new evanescently-coupled uni-traveling-carrier photodiode （EC-UTC PD） based on a multimode diluted waveguide （MDW） structure is fabricated, analysed and characterized. Optical and electrical characteristics of the device are investigated. The excellent characteristics are demonstrated such as a responsivity of 0.36 A/W, a bandwidth of 11.5 GHz and a small-signal 1-dB compression current greater than 18 mA at 10 GHz. The saturation current is significantly improved compared with those of similar evanescently-coupled pin photodiodes. The radio frequency （RF） bandwidth can be further improved by eliminating RF losses induced by the cables, the probe and the bias tee between the photodiode and the spectrum analyzer.A new evanescently-coupled uni-traveling-carrier photodiode （EC-UTC PD） based on a multimode diluted waveguide （MDW） structure is fabricated, analysed and characterized. Optical and electrical characteristics of the device are investigated. The excellent characteristics are demonstrated such as a responsivity of 0.36 A/W, a bandwidth of 11.5 GHz and a small-signal 1-dB compression current greater than 18 mA at 10 GHz. The saturation current is significantly improved compared with those of similar evanescently-coupled pin photodiodes. The radio frequency （RF） bandwidth can be further improved by eliminating RF losses induced by the cables, the probe and the bias tee between the photodiode and the spectrum analyzer.

关 键 词：evanescently-coupled uni-traveling-carrier photodiode multimode diluted waveguide beam propagation method 1-dB compression current 

分 类 号：TN364.2[电子电信—物理电子学]