Self-consistent three-dimensional modeling and simulation of large-scale rectangular surface-wave plasma source  

作　　者：蓝朝晖 蓝朝桢 胡希伟 陈兆权 刘明海 

机构地区：[1]College of Electrical and Electronic Engineering,Huazhong University of Science and Technology [2]Institute of Surveying & Mapping,Information Engineering University

出　　处：《Chinese Physics B》2009年第6期2412-2419,共8页中国物理B（英文版）

基　　金：Project supported by the Special Fund of National High-Tech Development and Research Plan (Grant No 2008AA12A214)

摘　　要：A self-consistent and three-dimensional （3D） model of argon discharge in a large-scale rectangular surface-wave plasma （SWP） source is presented in this paper, which is based on the finite-difference time-domain （FDTD） approximation to Maxwell＇s equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window.A self-consistent and three-dimensional （3D） model of argon discharge in a large-scale rectangular surface-wave plasma （SWP） source is presented in this paper, which is based on the finite-difference time-domain （FDTD） approximation to Maxwell＇s equations self-consistently coupled with a fluid model for plasma evolution. The discharge characteristics at an input microwave power of 1200 W and a filling gas pressure of 50 Pa in the SWP source are analyzed. The simulation shows the time evolution of deposited power density at different stages, and the 3D distributions of electron density and temperature in the chamber at steady state. In addition, the results show that there is a peak of plasma density approximately at a vertical distance of 3 cm from the quartz window.

关 键 词：FDTD method surface wave plasma fluid model 

分 类 号：O53[理学—等离子体物理]