大行程纳米级压电微动工作台的设计与试验研究  

Study on Design and Experimentation of Piezoelectric Micro-Moving Platform with Nano-Step and Long-Range

作　　者：胡长德[1] 赵美蓉[2] 李咏强[1] 高娟[1] 朱砂[1] 

机构地区：[1]装备指挥技术学院士官系,北京昌平102200 [2]天津大学精密测试技术及仪器国家重点试验室,天津300072

出　　处：《传感技术学报》2009年第6期803-807,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(50105016)“大范围实用型二维纳米定位控制及测量技术”

摘　　要：介绍了一种基于尺蠖运动原理的大行程纳米级级平台式步距压电微动台。在结构设计方面,夹紧器和驱动器都采用压电陶瓷对称结构,配合夹紧器的夹紧、放松,驱动器伸长或缩短,实现推-拉接力运动,保证微动台运动的平稳性和连续性;采用平台式结构,增强了其实用性。驱动控制方面,配以适当的四路驱动信号,实现了压电微动台的单步、多步连续匀速运动。通过试验对微动台的性能进行了测试,结果表明:微动台的运动位移是线性的,运动速度在驱动电压为200V可达13.9μm/s,最小步距小于10nm,行程大于20mm。A kind of piezoelectric micro-moving platform with long-range and nano-step has been developed, which is based on inchworm motion. The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship. By clamping or releasing of clampers and extending or retracting of actuators, it could achieve a kind of push-pull relay movement. In this way, the movement of platform is smooth and continuous. With the proper four-channels driving signals, the platform is moved linearly with single step or multi-step. The performances of the platform are tested through experiments. The results show that the motion of the platform is linear, the moving speed can reach 13. 9μm/s at the voltage of 200V and the minimal step is less than 10 nm, the moving range is more than 20 mm.

关 键 词：纳米定位 尺蠖运动 压电陶瓷 最小步距 大范围 

分 类 号：TM282[一般工业技术—材料科学与工程]