New development of atmospheric pressure plasma polishing  

作　　者：王波 张巨帆 董申 

机构地区：[1]Center for Precision Engineering,Harbin Institute of Technology

出　　处：《Chinese Optics Letters》2009年第6期537-538,共2页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (Nos.50535020 and 50775055);the Defense Advanced Research Foundation (No.9140A180202-06HT0132);the Natural Science Foundation of Heilongjiang Province (No.E200622)

摘　　要：Atmospheric pressure plasma polishing （APPP） high quMity optical surfaces. The changes of is a precision machining technology used for manufacturing surface modulus and hardness after machining prove the distinct improvement of surface mechanical properties. The demonstrated decrease of surface residual stresses testifies the removal of the former deformation layer. And the surface topographies under atomic force microscope （AFM） and scanning electron microscope （SEM） indicate obvious amelioration of the surface status, showing that the 0.926-nm average surface roughness has been achieved.Atmospheric pressure plasma polishing （APPP） high quMity optical surfaces. The changes of is a precision machining technology used for manufacturing surface modulus and hardness after machining prove the distinct improvement of surface mechanical properties. The demonstrated decrease of surface residual stresses testifies the removal of the former deformation layer. And the surface topographies under atomic force microscope （AFM） and scanning electron microscope （SEM） indicate obvious amelioration of the surface status, showing that the 0.926-nm average surface roughness has been achieved.

关 键 词：Atmospheric pressure MACHINING Mechanical properties MICROSCOPES Plasma sources POLISHING Precision engineering Scanning electron microscopy Surface roughness 

分 类 号：TG664[金属学及工艺—金属切削加工及机床]