掺杂WO3基丙酮气敏元件的研制  

Research on Doping WO_3-Based Acetone Gas Sensors

作　　者：贺文阳[1] 邓永和[1] 曾庆丰[2] 

机构地区：[1]湖南工程学院理学院,湖南湘潭411104 [2]贵州大学理学院,贵阳550003

出　　处：《微纳电子技术》2009年第6期375-378,共4页Micronanoelectronic Technology

基　　金：湖南省教育厅科研基金资助项目(05C578)

摘　　要：在WO3粉体材料中加入一定质量分数(w)的掺杂剂(Pt、Pd、PtO2、PdCl2、SnO2、SiO2、Al2O3),于恒温600℃烧结1h制作成旁热式丙酮气体敏感元件。采用静态电压测量法,研究和分析了不同的加热电压与不同掺杂配方元件灵敏度(β)的关系,进一步分析了掺杂剂对元件的响应与恢复时间的影响。实验结果表明,掺入质量分数为0.5%的Pt粉,在加热功率为600mW时,丙酮气敏元件的灵敏度提高约8倍,元件的响应时间和恢复时间分别缩短了约60%和88%。The indirectly heat type acetone gas sensitive sensor was prepared by mixing dopings （Pt, Pd, PtO2, PdCl2, SnO2, SiO2 and Al2O3） into WO3 powder and heating at stable 600 ℃ for one hour. Based on the static voltage measure method, the relation between the heat power and the sensitivity of sensors was studied, and the effect of the dopings on the responding and recovery times for different dopings was analysed. The results show that the sensitivity of the acetone gas sensor is increased about 8 times by doping 0. 5% Pt powder at 600 mW heat power and the responding time and recovery times are decreased about 60% and 88 %, respectively.

关 键 词：丙酮敏感元件 灵敏度 三氧化钨 掺杂剂 电化学 响应与恢复时间 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] TP212.3[自动化与计算机技术—控制科学与工程]