半导体及平板显示制造业中的空气非接触搬运技术  

Application of Non-Contact Air-Suspended Movement Technology in Semiconductor and FPD Production Industry

作　　者：王涛[1] 杨玉贵 彭光正[1] 

机构地区：[1]北京理工大学自动化学院,北京100081 [2]空军95949部队,河北沧州061036

出　　处：《液晶与显示》2009年第3期404-408,共5页Chinese Journal of Liquid Crystals and Displays

摘　　要：介绍了空气非接触搬运技术的优越性、发展现状及其在半导体器件和平板显示制造业中的应用,阐述了空气悬浮和吸浮式非接触技术的原理,讨论了空气非接触搬运技术中存在的关键问题及解决方案,分析了该技术的发展前景。The connotation and the application in the semiconductor and FPD production industry of non- contact air-suspended movement technology were introduced. The non-contact air-suspended movement technology principles including air float and suck float were explained. The important questions in the non-contact air-suspended movement technology and the solutions were discussed. The development foreground of the non-contact air-suspended movement technology was analyzed.

关 键 词：空气非接触搬运技术 半导体 液晶显示面板 制造装备 

分 类 号：TP211.32[自动化与计算机技术—检测技术与自动化装置] TM285[自动化与计算机技术—控制科学与工程]