基于高精度测微仪的晶圆预对准方法  

Wafer Pre-Aligning Method Based on High-Precision Digital Micrometer

作　　者：曲东升[1] 张世忠[1] 荣伟彬[1] 孙立宁[1] 

机构地区：[1]哈尔滨工业大学机器人技术与系统国家重点实验室,哈尔滨150080

出　　处：《纳米技术与精密工程》2009年第3期249-253,共5页Nanotechnology and Precision Engineering

基　　金：国家高技术研究发展计划(863)项目(2004AA420040);新世纪优秀人才支持计划资助项目(NCET-08-0170)

摘　　要：现有的基于高精度测微仪的预对准方法需交换晶圆才能够完成操作.为提高其效率,介绍了一种无需晶圆交换的预对准方法.该方法采用缺口定向先于圆心定位的预对准顺序,通过一维旋转和二维直线平移完成晶圆的定位.另外,还给出了该方法重复定位晶圆圆心和缺口的误差表达式.针对线性最小二乘圆拟合算法进行晶圆缺口拟合时计算精度不易保证的问题,提出了一种非线性晶圆缺口拟合算法,即利用Levenberg-Marquardt算法直接求解缺口边缘拟合问题.精度测试结果表明,该算法的计算误差近似为现有缺口拟合算法误差的1/2.The present wafer pre-aligning method based on high-precision digital micrometer needs to exchange wafer to accomplish the pre-alignment. In order to improve its efficiency, a method without exchanging wafer was presented. The method adopts a pre-aligning sequence in which notch-orientation is prior to center-positioning to accomplish the wafer alignment by one-dimensional rotation and two-dimensional translation. In addition, the expressions of repetitive position errors of notch and center positioning of this method were given. As it is difficult to guarantee the high calculation accuracy of linear least square fitting of notch, a nonlinear algorithm for notch fitting was proposed. The algorithm utilizes Levenberg-Marquardt algorithm to solve the notch fitting problem and is validated approximately to half of the calculation error of notch fitting by experiment.

关 键 词：晶圆预对准 LEVENBERG-MARQUARDT算法 最小二乘圆拟合 

分 类 号：TH89[机械工程—仪器科学与技术]