基于参比电容和锁定放大的微电容测量仪  

Low capacitance measuring instrument based on reference capacitance and lock-in amplifier

作　　者：彭建学[1,2] 叶银忠[1] 

机构地区：[1]上海海事大学物流工程学院,上海200135 [2]上海奥波电子有限公司,上海200072

出　　处：《上海海事大学学报》2009年第2期25-28,71,共5页Journal of Shanghai Maritime University

摘　　要：针对传统微电容测量技术存在的缺点,根据参比电容和锁定放大技术的微电容测量原理,研制出1种微电容测量仪.该微电容测量仪采用参比测量技术,用锁定放大技术对测量系统的噪声进行抑制.试验表明采用参比测量技术使测量结果不受激励电压波形和幅度影响.该微电容测量仪的最小测量量程达到0.1 pF,其微电容测量电路已申请发明专利.In view of the disadvantages of the conventional technology of measuring the low capacitance, a kind of low capacitance measurer is proposed according to the principle of the reference capacitance and lock-in amplifier technologies of measuring the low capacitance. Applying the technology of the reference measuring, the noise of the measuring system is suppressed by the lock-in amplifier technology in this measurer. The tests show that the test results are free from the wave shape and amplitude of driving voltage, and the minimal measuring range is O. 1 pF. The low capacitance measuring circuit of this measurer has been applied for a national patent of invention.

关 键 词：微电容测量 锁定放大 参比电容 噪声抑制 

分 类 号：TM934.23[电气工程—电力电子与电力传动] TP211.5[自动化与计算机技术—检测技术与自动化装置]