Si_3N_4陶瓷轴承NCD涂层制备中的温度场模拟  

FEA Simulation on Temperature Distribution during the NCD Film Deposition on Si_3N_4 Bearings

作　　者：杨春[1,2] 卢文壮[1,2] 左敦稳[1] 徐锋[1] 任卫涛[1] 

机构地区：[1]南京航空航天大学机电学院,江苏南京210016 [2]南京航空航天大学江苏省精密与微细制造技术重点实验室,江苏南京210016

出　　处：《机械制造与自动化》2009年第3期16-18,36,共4页Machine Building & Automation

基　　金：国家自然科学基金资助项目(No:50605032);江苏省自然基金资助项目(编号分别为:BK2006189和BK2007193)

摘　　要：纳米金刚石(NCD)薄膜涂层由于优异的力学和摩擦学性能,是一种理想的轴承涂层材料。在用HFCVD方法制备NCD涂层的过程中,衬底温度是重要参数之一。首先设计了一种适合轴承内外圈NCD涂层制备的热丝夹持装置,其次分析了HFCVD系统的热交换过程,并建立了相应的衬底温度场的三维有限元模型。在此模型基础上具体讨论了热丝数目、温度、热丝到衬底距离等因素对衬底温度大小及均匀性的影响。结果表明,由于衬底相对尺寸较小并且考虑了衬底内部的热传导,各参数的变化对衬底温度大小有明显影响,但对衬底温度均匀性影响不大。结果为轴承NCD涂层的制备提供了理论基础。Nano-crystalline diamond（NCD） film is an ideal kind of bearing coating, this is attributed to its preeminent mechanical and tribological properties. The substrate temperature is one of the most important factors during growing NCD film by using HFCVD method. A new kind of holding device for growing NCD film on bearings is designed firstly. Then three dimensions finite element models are built up. The effect on the hot filament temperature, the substrate-filament distance, the number of filaments is dis- cussed. Because of the effect on three dimensions thermal conduction of substrate, the temperature is more uniform than those in pure heat radiation system and all of the deposition parameters have little effect on the uniformity of the substrate temperature. The results orovide the basis for hiah aualitv NCD film oreoaration on bearinas.

关 键 词：陶瓷轴承 热丝法 纳米金刚石涂层 温度场 有限元分析 

分 类 号：TH133.3[机械工程—机械制造及自动化]