NiSi/Si(001)声子模式对称性分析  

Analysis on Phonon Modes’ Symmetry Properties of NiSi/Si(001) Film

作　　者：唐波[1] 万里[1] 程新红[1] 张学飞[1] 任一民[1] 徐大鹏[1] 罗海军[1] 黄运米[1] 

机构地区：[1]温州大学物理与电子信息工程学院,浙江温州325035

出　　处：《温州大学学报（自然科学版）》2009年第4期55-60,共6页Journal of Wenzhou University(Natural Science Edition)

摘　　要：通过极化拉曼对以Si(001)为衬底、生长方向为NiSi[200]//Si[001]的NiSi薄膜材料的拉曼峰进行了声子模式的分组,确定实验得到的NiSi薄膜的六个拉曼峰分别属于三类声子模式.其中213cm-1、295cm-1和367cm-1处拉曼峰属于Ag对称性;196cm-1和254cm-1处拉曼峰属于B3g对称性;401cm-1处拉曼峰属于B1g或B2g对称性.NiSi film had been grown on Si（001） substrate with an orientation of NiSi[200]HSi[001]. Polarized Raman spectrum had been used to assign symmetries of the NiSi Raman peaks. 6 Rarnan peaks of NiSi film, which could be classified into 3 phonon modes, were monitored in the experiment. Among them, Raman peaks at 213 cm^-1, 295 cm^-1, and 367 cm^-1 are assigned to be As symmetry, peaks at 196 cm^-1, and 254 cm^-1 are B3g symmetry and peak at 401 cm^-1 is B1g or B2g symmetry.

关 键 词：NiSi薄膜 拉曼光谱 极化 退火 

分 类 号：O484[理学—固体物理]