CdTe薄膜的红外光学特性研究  

INFRARED OPTICAL PROPERTIES OF CdTe COATINGS

作　　者：范滨[1] 张素英[1] 朱玲心[1] 张凤山[1] 

机构地区：[1]中国科学院上海技术物理研究所

出　　处：《红外与毫米波学报》1998年第3期192-196,共5页Journal of Infrared and Millimeter Waves

基　　金：国防科技预研基金

摘　　要：用干涉法研究了热蒸发（ＰＶＤ）方法制备的ＣｄＴｅ薄膜材料的红外光学特性．通过对不同基板温度和不同薄膜厚度ＣｄＴｅ薄膜样品的研究，确定了在薄膜沉积过程中基板温度和膜厚对ＣｄＴｅ薄膜红外光学特性的影响．发现ＣｄＴｅ薄膜具有一定的非均匀性，其折射率随着薄膜厚度的增加而减小．在１２０～２００℃范围内，基板温度对ＣｄＴｅ薄膜红外光学特性的影响不大．Infrared optical properties of CdTe coatings deposited by PVD method were investigated by interference method. With the study of CdTe coatings deposited at different substrate temperture and of different thickness, it was found that CdTe coatings are inhomogeneous, and the refractive index of CdTe coatings varies with the thickness of layer. It was also found that the substrate temperature between 120℃ and 200℃ almost has no effect on optical properties of CdTe coatings.

关 键 词：折射率 基板温度 红外光学特性 碲化镉 薄膜 

分 类 号：TN304.22[电子电信—物理电子学] TN213.01