TEA CO_2激光器均匀场电极的设计  

Design of electrodes with uniform electric fields in TEA CO_2 lasers

作　　者：耿玉民[1] 李殿军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《中国光学与应用光学》2009年第3期258-262,共5页Chinese Optics and Applied Optics Abstracts

摘　　要：介绍了TEA CO2激光器大面积均匀场放电电极的设计以及实验结果。无限大平行平板电极两极间的电场分布是均匀的,要在有限的(电极)尺寸条件下实现电场的均匀性设计,即将设计问题转变为放电电极剖面形状的理论和工程计算问题。本文根据TEA CO2激光器工作的实际情况,选择Chang氏理论作依据设计了均匀场放电电极。实验结果表明,使用该电极TEA CO2激光器可在500Hz高重复频率脉冲条件下连续工作10min,并在55mm放电电极宽和平坦部分为40mm剖面的平行平板两个主放电极之间实现了大面积稳定的均匀场辉光放电,解决了主放电电极大面积放电易产生弧光放电影响TEA CO2激光器长期稳定工作的问题。The design of electrodes with large area uniform electric fields for TEA CO2 lasers and the experimental results are introduced in this paper. Generally, the distribution of electric fields is uniform between two electrodes with boundless parallel slabs, but the design of uniform electric fields in the condition of limited sizes of electrodes has been transformed to the theoretical and engineering computations for profiles of discharge electrodes. According to the practical working conditions, the Chang＇s theory is chosen as the reference to design the electrodes with uniform electric fields. The experimental results show that the TEA CO2 laser with designed electrodes is able to continuously work for 10 min in the condition of high repetition rate 500 Hz and the uniform glow discharge has been realized in a large area between two main electrodes with a width of 55 mm and flatness part of 44 mm. The electrodes designed here overcome the problem of arc discharge from the large area discharge in main discharge electrodes and provide a long work stability for TEA CO2 lasers.

关 键 词：辉光放电 均匀场电极 电极剖面 TEA CO2激光器 

分 类 号：TN248.22[电子电信—物理电子学]