6.5～14μm红外长波通滤光片正面膜系的研制  

Research of 6.5～14μm infrared long-wavelength pass filter pro-film system

作　　者：朱铄金[1] 朱丽慧[1] 黄清伟 

机构地区：[1]上海大学上海市现代冶金及材料制备重点实验室,上海200072 [2]上海普爱尔传感器有限公司,上海201203

出　　处：《光学仪器》2009年第3期80-83,共4页Optical Instruments

摘　　要：采用了规整膜系作为6.5～14μm红外长波通滤光片正面膜系的初始膜系,针对规整膜系中存在较大通带波纹的现象,利用Macleod光学薄膜分析软件有选择地对部分膜层进行优化。根据优化后的膜系设计结果,采用热电阻真空蒸发镀膜工艺镀制。光谱测试表明,膜系在6.5～14μm工作波段的通带波纹平坦,平均透过率达到88.5%,在3～5.5μm截止范围内T_(max)<0.2%,并具有很好的截止带边缘陡度。该膜系具有工艺简单,膜厚监控易于操作的特点,适用于工业大规模生产。In this paper, the initial film of 6.5-14μm infrared long-wavelength pass filter profilm system was designed by means of quarter film system, and in order to solve the passband ripple of quarter film system optical film analysis software Macleod was used to refine the thickness of some chosen films. Based on the designed film, 6. 5-14μm IR long-wavelength pass filter pro-film system was prepared by vacuum evaporation. The experimental result shows that, the spectrum has a relatively flat passband ripple and a high stopband edge gradient. The average transmittance of 6. 5-14μm passband is 88. 5% and the maximum transmittance of 3-5. 5μm stopband is lower than 0. 2%. The pro-film system is simplified and is suitable for industrial production since it is convenient to monitor the film thickness.

关 键 词：红外 规整膜系 长波通滤光片 通带波纹 膜系设计 

分 类 号：O484.4[理学—固体物理]