SECM微纳米定位建模及控制器设计  

Modeling and Controller Design of SECM Micro/Nanopositioning Systems

作　　者：张栋[1] 张玉林[1] 李现明[1] 魏强[2] 

机构地区：[1]山东大学控制科学与工程学院,济南250061 [2]泰山学院物理与电子科学系,山东泰安271021

出　　处：《微纳电子技术》2009年第7期428-432,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50877046)

摘　　要：为适应扫描电化学显微镜(SECM)常规应用中100nm左右的微定位精度需求,同时降低其微定位控制器的成本,在分析SECM压电工作台运动定位数学模型的基础上,结合SECM实际应用中的特点,将压电工作台数学模型进行了合理的简化,并在此基础上设计了算法简单且易于实现的开环微定位控制器。以CHI900B型扫描电化学显微镜的三维压电工作台为实验对象进行建模和控制器设计,实验结果表明,压电工作台运动定位平均跟踪误差和最大跟踪误差分别为0.093、0.115μm,误差约0.1μm,可满足SECM常规应用中的微定位精度需求。建模过程和控制器设计简单易行且无须额外的微定位传感器,适于SECM的常规应用。In order to satisfy the micro/nanopositioning accuracy request around of 0.1 μm in the conventional application of scanning electrochemistry microscope（SECM） and reduce the cost of the micro/nanopositioning controller,the mathematical model of piezopositioning stage was analyzed.Then considering the characteristics of SECM in conventional application,a simple model of piezopositioning stage was built and an open-loop controller was designed.Furthermore,modeling process and controller design of the piezopositioning stage of CHI900B SECM were elaborated,and experimental results indicate that the mean tracking error and the maximum tracking error are 0.093 and 0.115 μm respectively which are around of 0.1 μm and satisfy the anticipated target.The modelling process and the controller design are easy and feasible,and do not need extra micro/nanopositioning sensors,which are very suitable for the conventional application of SECM.

关 键 词：扫描电化学显微镜 压电工作台 运动定位 控制器 迟滞模型 

分 类 号：TH742[机械工程—光学工程]