微纳结构功能性雕塑薄膜  

Functional Micro/nano-structural Sculptured Thin Films

作　　者：江绍基[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《激光与光电子学进展》2009年第7期23-27,共5页Laser & Optoelectronics Progress

摘　　要：微纳结构雕塑薄膜是在低温环境下采用倾斜角沉积技术再辅以基片的运动而制备得的各向异性功能性薄膜。由于沉积过程中的自阴影效应使得雕塑薄膜中存在很多孔洞,而且微观结构复杂多样,从而表现出很多新颖的光学特性,因此可作为微纳光电子器件实现工业应用。Micro/nano-structural sculptured thin films （STFs） are anisotropic functional films by means of glancing angle deposition （GLAD） with the rotation of substrate. The self-shadowing effect during deposition makes a lot of voids and complicated microscopic structures in STFs, thus STFs have many speciaJ optical properties that can be used as micro/nano-optoelectronic devices and STFs fabricated on substrate with periodical pre-structures satisfy the preparation qualities for three-dimensional photonic crystals.

关 键 词：雕塑薄膜 倾斜角沉积 预结构 三维光子晶体 

分 类 号：TN15[电子电信—物理电子学] TQ320.721[化学工程—合成树脂塑料工业]