一种新型三维敏感效应电容式SO_2气体传感器设计  

Design of new capacitive gas sensor for SO_2 with three-dimensional sensitive effect

作　　者：赵良[1] 陈向东[1] 杨英[1] 张清锦[1] 

机构地区：[1]西南交通大学信息科学与技术学院,四川成都610031

出　　处：《传感器与微系统》2009年第7期68-70,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60572026;60871024);教育部新世纪优秀人才支持计划支持项目(A0160419950120)

摘　　要：传统气体传感器只能以简单一维扩散方式对气体响应,扩散机理是建立在表面效应基础上的。提出了一种新型电容式SO2气体传感器。该传感器敏感结构由离散的微型圆柱体单元三维式扩散模型组成,模型上表面和侧面同时接触被测气体,扩大了与被测气体的接触面积。根据气敏薄膜的扩散响应理论,对传感器的响应时间作出分析,并与梳状电容式气体传感器特性相比较,说明新型传感器具有响应时间更短的优点。The response mechanism of traditional gas sensor is based on surface effect by one-dimensional diffusion. A new capacitive gas sensor for SO2 is put forward. The structure is made up of cylinder model with three-dimensional diffusion, which upper and side surfaces can meet the gas at the same time to enlarge the area with gas. According to the theory of film diffusion, the response time of gas sensor is analyzed and compared with traditional sensor, and the new gas sensor has less response time.

关 键 词：电容式 SO2 气体传感器 圆柱体单元 响应时间 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]