深紫外固体激光系统  

Deep Ultraviolet Solid-State Laser System

作　　者：林彦[1] 霍玉晶[1] 何淑芳[1] 

机构地区：[1]清华大学电子工程系,北京100084

出　　处：《中国激光》2009年第7期1826-1830,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金重点项目(50132010)资助课题

摘　　要：报道了一种利用非线性光学频率变换技术生成深紫外激光的固体激光系统。此系统采用基于CLBO晶体和频的频率变换方案,参与和频过程的两路激光分别是一台全固态声光调Q Nd:YVO4激光器输出的1064 nm近红外激光和一台灯抽运电光调Q倍频Nd:YAG激光器抽运的钛宝石激光器输出的三倍频238.7 nm紫外激光。对系统中的调Q倍频Nd:YAG激光器、钛宝石激光器、BBO三倍频模块、调Q Nd:YVO4激光器以及CLBO和频模块进行了详细描述。最后,在实验中获得了最高功率217μW,重复频率10 Hz的195 nm深紫外激光输出。A deep ultraviolet solid-state laser system using nonlinear optical frequency conversion technique, which is based on sum-frequency generation in a CLBO crystal is reported. The two beams involved in the sum-frequency generation are 1064 nm from an all-solid-state acoustic-optic Q-switched Nd： YVO4 laser and 238.7 nm from a thirdharmonic generation of a Ti： sapphire laser pumped by a lamp-pumped electronic-optic Q-switched frequency-doubled Nd： YAG laser. The Q-switched frequency-doubled Nd： YAG laser, Ti： sapphire laser, BBO third-harmonic generator, Q-switched Nd：YVO4 laser and CLBO sum-frequency generator in the system are described in detail. Stable 195 nm deep ultraviolet laser with maximum output power of 217 μW at 10 Hz is achieved in experiment.

关 键 词：激光器 深紫外激光 固体激光器 CLBO晶体 和频 

分 类 号：TN248.1[电子电信—物理电子学]