热处理对氧化钒薄膜成分和形貌的影响  

Composition and Morphology of Vanadium Oxide Thin Film Affected by Heat Treatment

作　　者：宋晶晶[1] 张津[1,2] 孙智富[3,4,5] 刘成龙[1] 孙健 

机构地区：[1]重庆理工大学材料学院,重庆400050 [2]北京科技大学新材料技术研究院,北京100083 [3]武汉理工大学材料学院,武汉430070 [4]重庆理工大学教育部汽车零部件制造及检测技术重点实验室,重庆400050 [5]重庆机电技术学院,重庆400050

出　　处：《武汉理工大学学报》2009年第13期19-21,63,共4页Journal of Wuhan University of Technology

摘　　要：二氧化钒薄膜特殊的可逆相变特性,决定其有着巨大的应用潜能,由于钒与氧结合可以形成几十种氧化物,因此制得严格化学配比的二氧化钒薄膜始终是一个难点,目前国际上制备此薄膜的方法虽多样化,但都不成熟,实验采用两步工艺,先用射频磁控溅射法制备高纯度的五氧化二钒薄膜,再在N2保护下进行后续热处理,得到二氧化钒含量较高的氧化钒薄膜,并对热处理前后薄膜的成分、形貌进行XRD,XPS,SEM,AFM分析,得出热处理对氧化钒薄膜的成分和形貌的影响。Special reversible phase-change characteristic of VO2 film determines their great potential application. But because vanadium can be combined with oxygen to form dozens of oxides, preparation of strict chemical ratio vanadium dioxide film is very difficult. All kinds of methods are used to prepare vanadium dioxide film all over the world. But all the methods are not maturity. In this study, two-step process is used, firstly preparation of high-purity vanadium pentoxide film by radio frequency magnetron sputtering, and then following by heat treatment in the protection of nitrogen. The film which has a high level of vanadium dioxide is prepared in this way. The composition and morphology of the film, before and after the heat treatment, is analysis by XRD, XPS, SEM and AFM. The impact of heat treatment to vanadium oxide thin film in composition and topography has been summarized.

关 键 词：V2O5薄膜 VO2薄膜 热处理 

分 类 号：TQ135.1[化学工程—无机化工] O571.33[理学—粒子物理与原子核物理]